3D Measurement 三维测量

NS3800

NS3800

NS-3800是一款高速激光共聚焦显微镜,可进行精确,可靠的3维测量。 NS-3800被优化设计为安装在检查系统上的测量模块。 (对于台式型号,请参阅NS-3500。)NS-3500还可在工厂机器上实现高精度共焦测量。 易于安装且坚固耐用的工业设备设计为现场应用提供了很好的解决方案。 可进行定制设计更改。



NS3800
 
应用案例:  
                             












规格:



Model
Head module NS-3800
Remark
Controller NS-3500E
Objective lens magnification 10× 20× 50× 100× 150×  

Observation /
Measuring range
Horizontal (H): μm 1400 700 280 140 93
Vertical (V): μm 1050 525 210 105 70
Working distance:  mm 16.5 3.1 0.54 0.3 0.2
Numerical aperture (N.A.) 0.30 0.46 0.80 0.95 0.95
Optical zoom ×1 to ×6  
Total magnification 178× to 26700×  
Optical system for observation / measurement Pinhole confocal optical system  


Height measurement

Measuring scan range
Fine scan : 100 μm (and/or) Long scan : 7 mm  [NS-3800-L]
Note 1
Fine scan : 400 μm (and/or) Long scan : 10 mm  [NS-3800-D]
Fine scan : 200 μm (or) Long scan : 10 mm  [NS-3800-T]
Display resolution 0.001 μm  
Repeatability  σ 0.010 μm Note 2

Width measurement
Display resolution 0.001 μm  
Repeatability  3σ 0.02 μm Note 3


Frame memory
Pixel count 1024×768, 1024×384, 1024×192, 1024×96  
For confocal image 12 bit  
For color image 8-bit for RGB each  
For height measurement 16 bit  

Frame rate
Surface scan 20 Hz to 160 Hz  
Line scan ~8 kHz  
Auto function Auto focus  

Laser beam light source for confocal measurement
Wavelength Violet laser, 405 nm  
Output ~2 mW  
Laser Class Class 3b  
Laser light-receiving element PMT (photomultiplier tube)  
Data processing unit Dedicated PC  

Power supply
Power-supply voltage 100 to 240 VAC, 50/60 Hz  
Current consumption 500 VA max.  

Weight
Microscope Approx. ~ 8 kg  
Controller ~8 kg  


Note 1 :  Fine scan is performed by piezoelectric actuator (PZT).
Dual scan mode by fine and long scanner is available only for single lens type.
Note 2 :  100 times measurement of standard sample (1μm step height) with 100× / 0.95 objective.
Note 3 :  100 times measurement of standard sample (5μm pitch) with 100× / 0.95 objective.